A performance analytical model of automated material handling system for semiconductor wafer fabrication system
针对半导体晶圆制造中的闭环自动化物料搬运系统，提出一种改进的马尔可夫链模型，有效处理车辆阻塞和捷径配置，避免状态空间爆炸，并用实际数据验证了其在系统设计阶段的性能分析有效性。
To effectively analyse and evaluate the performances of closed-loop automated material handling system (AMHS) with shortcut and blocking in semiconductor wafer fabrication system, a modified Markov chain model (MMCM) has been proposed. The system characteristics, such as vehicle blockage and system’s shortcut configuration, are well considered in the MMCM. The state space explosion problem and computational challenge due to the increase of AMHS scale can be effectively eliminated. With production data from Interbay material handling system of a 300-mm semiconductor wafer fabrication line, the proposed MMCM is compared with simulation analysis model. The results demonstrate that the proposed MMCM is an effective modelling methodology for AMHS’s performance analysis at system design stage.