Some Considerations in the Use of Quality Control Techniques in Integrated Circuit Fabrication
本文指出集成电路制造中缺陷不独立，标准统计工具（如控制图、验收抽样）可能失效，并回顾了当前研究，提出修改建议。
Statistical tools which depend on the assumption of defect independence are often inappropriate in the integrated circuit (Ic) environment where this assumption is found not to hold. All standard tools and techniques must be re-examined to assess their validity in a non-independent defect environment. This paper reviews current work in the field. We discuss the ic industry today and how manufacturing issues cause difficulties in analysis using standard tools; control charts and acceptance sampling plans will be highlighted. Suggestions on how these tools can be modified to account for this non-independent behavior will be given.