Potential occupational health hazards in the microelectronics industry.
该文指出微电子行业使用大量有毒化学品，以加州1981年半导体行业研究为例，说明制造过程中溶剂、酸和砷等金属以及掺杂气体（如砷化氢、磷化氢、乙硼烷）对工人健康的潜在危害，呼吁进一步研究。
The microelectronics industry is a major user of a wide variety of chemicals and other toxic materials. In the recent past semiconductor manufacturers have located in many countries and brought a new set of challenging clinical problems to occupational physicians. California, an area with a significant history in the statistical study of health and safety in the microelectronics industry, presents some evidence of potential health hazards in the semiconductor manufacturing process. The Semiconductor Industry Study done in California in 1981 explains the application of many toxic materials in the semiconductor manufacturing process, including a variety of solvents, acids, and metals such as arsenic. The Study documents the extensive use of dopant gases, primarily arsine, phosphine and diborane. Further study is necessary to assure the health and safety of microelectronics workers, particularly in the application of dopant gases.