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基于弹性网正则化的稀疏组主成分分析及其在半导体制造虚拟计量中的应用

Sparse group principal component analysis using elastic-net regularisation and its application to virtual metrology in semiconductor manufacturing

International Journal of Production Research · 2024
被引 6
ABS 3

中文导读

提出一种弹性网正则化的稀疏组PCA方法,自动发现稀疏主成分载荷向量,无需预设稀疏度,在合成和真实数据集上表现优于现有方法,适用于半导体制造虚拟计量。

Abstract

Principal component analysis (PCA) is a widely used statistical technique for dimensionality reduction, extracting a low-dimensional subspace in which the variance is maximised (or the reconstruction error is minimised). To improve the interpretability of learned representations, several variants of PCA have recently been developed to estimate the principal components with a small number of input features (variable), such as sparse PCA and group sparse PCA. However, most existing methods suffer from either the requirement of measuring all the input variables or redundancy in the set of selected features. Another challenge for these methods is that they need to specify the sparsity level of the coefficient matrix in advance. To address the above issues, in this paper, we propose an elastic-net regularisation for sparse group PCA (ESGPCA), which incorporates sparsity constraints into the objective function to consider both within-group and between-group sparsities. Such a sparse learning approach allows us to automatically discover the sparse principal loading vectors without any prior assumption of the input features. We solve the non-smooth regularised problem using the alternating direction method of multipliers (ADMM), an efficient distributed optimisation technique. Empirical evaluations on both synthetic and real datasets demonstrate the effectiveness and promising performance of our sparse group PCA than other compared methods.

主成分分析稀疏学习半导体制造虚拟计量降维