DMWMNet：一种用于半导体制造中高性能混合型晶圆图缺陷检测的新型双分支多级卷积网络

DMWMNet: A novel dual-branch multi-level convolutional network for high-performance mixed-type wafer map defect detection in semiconductor manufacturing

• Xiangyan Zhang
• Zhong Jiang
• Hong Yang
• Yadong Mo
• Linkun Zhou
• Ying Zhang